发明名称 PELLICLE
摘要 <p>PURPOSE:To suppress the generation of dust from an adhesive layer by providing a tacky adhesive layer in a part of the adhesive layer which secures a supporting frame and an optical thin-film body. CONSTITUTION:The source for generating dust of very small foreign matter generated by a physical shock, etc., is an adhesive agent 3 used at the time of fixing the supporting frame 2 and the optical thin-film body 1. The tacky adhesive layer 6 is made to exist in a part of the adhesive layer 3 in the part of the outer and inner side sections of the supporting frame 2 where the adhesive layer 3 is exposed. A tacky adhesive agent in the form of being suspended or dissolved in water or org. solvent, etc., and a transfer tape in the form of depositing the agent on a tape, etc., are applicable as the material to constitute the tacky adhesive layer 6. The pellicle is capable of sealing the source for the generation of dust is this way and the quality and reliability thereof are additionally enhanced.</p>
申请公布号 JPH02135345(A) 申请公布日期 1990.05.24
申请号 JP19880287790 申请日期 1988.11.16
申请人 ASAHI KASEI DENSHI KK 发明人 ASAI HISAO;MATSUI TAKEKI
分类号 G03F1/62;H01L21/027 主分类号 G03F1/62
代理机构 代理人
主权项
地址