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发明名称
PHOTOTREATING APPARATUS
摘要
申请公布号
EP0175456(B1)
申请公布日期
1990.05.23
申请号
EP19850305236
申请日期
1985.07.23
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
SEKINE, MAKOTO C/O PATENT DIVISION;OKANO, HARUO C/O PATENT DIVISION;HORIIKE, YASUHIRO C/O PATENT DIVISION
分类号
H01L21/205;B01J19/12;C23C16/48;C23F1/12;C23F4/00;G03F7/004;H01L21/302;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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