| 摘要 |
The sensor 1 includes a case 2 having a wall formed by a membrane 3 which is permeable to the gas whose concentration it is desired to measure. An aqueous solution of a suitable electrolyte is placed in the case 2, in contact with the membrane 3. A field-effect transistor sensitive to the ions 5 is integrated into a wafer (board) 4 of semiconductor material and a support 14 holding this wafer (board) 4 in the case 2 so that its side 4a where the sensitive zone of the transistor 5 lies is in contact with the electrolyte 16 in the immediate vicinity of the membrane 3. The support 14 is furthermore arranged so that the other side 4b of the wafer (board) 4 is isolated from the electrolyte 16. The source and the drain of the transistor 5 are electrically connected to metal layers deposited in blind holes opening into the second side 4b of the wafer (board) 4, and leads 12, 13 intended to connect this source and this drain to a measurement apparatus are fixed to these metal layers by conductive adhesive. These leads 12, 13 pass into the support 14 which is filled with a solidified plastic. Application to the measurement of the concentration of a gas in a fluid. <IMAGE>
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