| 摘要 |
<p>PURPOSE:To provide a conveyor for cleanly conveying an article of an arbitrary shape with its lower face being planar and effectively controlling its speed by laterally splitting one side of a conveying face or the conveying face, and providing its center with a driver for applying a conveying direction force to the article in contact with one side of the article. CONSTITUTION:A semiconductor wafer 1 is floated and supported on a conveying face 3 by injected gas from first gas injection holes 4, and pressed to a driver 6 side by the injected gas from second gas injection holes 5. That is, the part of the outer surface of the wafer 1 is brought into contact with two pins 7, and the wafer 1 is held in the shape interposed between the pins 7. Then, when an actuator 8 of the driver 6 is driven to move the pins 7, the wafer 1 is conveyed together with the pins 7. In this case, since the interval L of the two pins 7 of the driver 6 is sufficiently wide, the wafer 1 is stably held by the pins 7. The start, acceleration, deceleration, stop and positioning of the wafer 1 can be facilitated by the speed control of the driver 6.</p> |
