| 摘要 |
<p>PURPOSE:To execute a replacement operation without relying on an operator's memory or the like by installing a means to display the timing for replacement of an object to be treated for dummy use when the limited number of usable times, of the object to be treated for dummy use, which has been set in advance for each treatment content of a treatment container has been reached. CONSTITUTION:A control part 60 increases the number of used times whenever a batch treatment of a wafer 11 for treatment use mounted on a port 5 as a treatment container has been finished; after the treatment has been finished, the control part reads out the limited number of usable times which has been set in advance by a memory 64; the control part compares the current number of used times with the limited number of usable times. Only when both of the number of times coincide, a display, e.g., an alarm 68, is driven. Accordingly, it is possible to surely recognize the proper timing for replacement in such a way that an operator need not pay attention to anything about the timing for replacement which relied on the operator's experience and memory in a conventional method.</p> |
