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发明名称
LIQUID-PHASE CRYSTAL GROWTH APPARATUS
摘要
申请公布号
JPH02123734(A)
申请公布日期
1990.05.11
申请号
JP19880277739
申请日期
1988.11.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
HATTORI AKIRA
分类号
C30B19/06;H01L21/208
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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