发明名称 ANORDNING FOER FRAMSTAELLNING AV EN FRISTAOENDE KISELKRISTALL.
摘要 An apparatus for manufacturing single silicon crystal comprises a quartz crucible (1) accomodated into a graphite crucible (2), a partition member (8) partitioning molten silicon material in the quartz crucible into a single silicon growing portion on the inner side and a material melting portion on the outer side, a heater (3) for maintaining the molten silicon material in the single silicon growing portion at a temperature appropriate for growing the single silicon crystal and for supplying heat for melting the raw materials fed into the material melting portion, and small holes (9) made in the partition member. The partition member is made of an opaque quartz glass. The material melting portion is replenished with the raw materials and single silicon crystal is pulled from the single silicon growing portion. Molten silicon material moves from the material melting portion into the single silicon growing portion through small holes made in the partition member.
申请公布号 FI902336(A0) 申请公布日期 1990.05.10
申请号 FI19900002336 申请日期 1990.05.10
申请人 NKK CORPORATION 发明人 SHIMA, YOSHINOBY;OHMURA, MASANORI;OHTANI, AKIRA;ARAKI, KENJI
分类号 C30B15/00;C30B15/12;C30B29/06;H01L21/208;(IPC1-7):C30B/ 主分类号 C30B15/00
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