| 摘要 |
PURPOSE:To make it possible to form a photo-charging member simply by forming an amorphous silicon membrane on a collector at the cathode side of a sheet-form storage battery, and forming a p/n connection of a polycrystal silicon on the silicon membrane. CONSTITUTION:On the upper collector 101 of a sheet-form storage battery 100, an intrinsic amorphous silicon membrane 106 is formed by an electric plating, and over the silicon membrane 106, a light is radiated to heat while letting flow an impure gas to form a p-type semiconductor membrane, to convert from the amorphous silicon 106 to a polycrystal p-type silicon membrane 107. The light is radiated to heat again while letting flow an impure gas to form an n-type semiconductor membrane on the p-type silicon membrane 107, to convert the surface layer of the p-type silicon membrane into the n-type silicon membrane 108. By receiving the radiation of light to the photo-charging member 200 formed in the p/n connection, an electromotive force is generated. Consequently, the photo-charging member 200 can be formed in a large area by a simple wet process. |
