Mim cold-cathode electron emission elements and methods of manufacture thereof.

摘要

An MIM type of electron emission element having a thin insulating film (2) formed below an electron emission region (4) of a metal layer (3), with that electron emission region of the metal layer consisting of an array of thick and thin portions (3a, 3b), distributed throughout the electron emission region. Improved efficiency and uniformity of of emission are obtained, due to the low resistance of the thick portions, which effectively apply a supply voltage to the thin portions of the metal layer, while the thin portions can be made sufficiently thin to maximize the electron emission level.