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发明名称
APPARATUS FOR PULLING UP SINGLE CRYSTAL
摘要
申请公布号
JPH02120295(A)
申请公布日期
1990.05.08
申请号
JP19880272947
申请日期
1988.10.31
申请人
TOSHIBA CORP
发明人
NAKADA YUJI;YASUNAGA TOSHIO;NISHIO JOSHI
分类号
C30B15/22;H01L21/208
主分类号
C30B15/22
代理机构
代理人
主权项
地址
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