| 摘要 |
PURPOSE:To make laser intensity on a sample surface accurate by providing a laser annealing system using a plurality of laser light sources with light attenuators capable of independently changing the intensity of each laser beam without changing the intensity distribution, and shutters capable of independent cut off, and a laser power meter arranged in front of the sample. CONSTITUTION:In an ordinary scanning process, a laser beam 11 reaching a sample 9 scans only the sample 9. When the laser intensity is to be measured, a laser power meter 8 arranged in the vicinity is set at the position of an objective 7 by moving an X-Y table 10. When the meter 8 moves at a position where the beam is received and the intensity can be measured, the shutter 3 on the measurement side is opened, and a specified light intensity is obtained by rotating or moving a light attenuator 4. When this operation has been performed for each beam 11, the beam intensities on the sample 9 surface accurately coincide with one another, and the intensity distributions are not changed. Thereby, the intensity only can be changed without changing the intensity distribution, and the damage of a detector is avoided. |
