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发明名称
PIEZOELECTRIC-ELEMENT DISPLACEMENT AMPLIFICATION MECHANISM
摘要
申请公布号
JPH02119277(A)
申请公布日期
1990.05.07
申请号
JP19880273620
申请日期
1988.10.28
申请人
NEC CORP
发明人
SANO MITSUNORI;HAMADA KIYOTAKA
分类号
H01L41/083;H01L41/09
主分类号
H01L41/083
代理机构
代理人
主权项
地址
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