MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19880273421-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH02119222(A)	申请公布日期	1990.05.07
申请号	JP19880273421	申请日期	1988.10.28
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	OGAWA HISASHI;MATSUMOTO MICHIICHI;IWASAKI YUTAKA
分类号	H01L21/3205;H01L21/28;H01L23/52	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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