| 摘要 |
PURPOSE:To miniaturize the device by providing an electrode and a magnetic pole for ionizing gas molecules going straight ahead from a low vacuum region to a high vacuum region in a beam line in the region just before the low vacuum side of an exhaust system for mounting in the beam line. CONSTITUTION:Light 3 emitted from a light source 1 goes straight ahead in a beam line 10, is taken out in a chamber 4 from a light taken-out window 10a to be a light beam 3'' passed in a mask 5 and patterning light exposure is performed on the surface of a specimen 6. On the other hand, gas molecules going straight ahead to the light source from the light taken-out window 10a are exhausted in each differential exhaust system, but ultimate vacuum is experimentally confirmed that when the vacuum of the region (1) is 1X10<-6>Torr, the vacuum of the region (2) does not much exceed 1X10<-7>Torr, the vacuum of the region (3) does not much exceed 1X10<-8>, and the vacuum of the region (4), namely, the region of a light source 1 does not exceed 1X10<-9>-1X10<-10>Torr. |
