POSITIONING DEVICE FOR GLASS SUBSTRATE,申请号JP19880270312-传众专利搜索

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发明名称	POSITIONING DEVICE FOR GLASS SUBSTRATE
摘要
申请公布号	JPH02116885(A)	申请公布日期	1990.05.01
申请号	JP19880270312	申请日期	1988.10.26
申请人	TOKYO ELECTRON LTD	发明人	SAKAKAWA HIDEO;KOMATSU SHIGEKAZU;AKIYAMA SHUJI
分类号	G09F9/00	主分类号	G09F9/00
代理机构		代理人
主权项
地址

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