| 摘要 |
PURPOSE:To enable an easy and highly accurate resist pattern inspection to be made without cutting a substrate by forming a clicking die resist pattern in required shape at a pattern part for controlling dimensions which is adjacent to the resist pattern when forming it and by achieving visual observation from a slant direction. CONSTITUTION:When forming a rectangular resist pattern by irradiating and etching with electronic beam, etc., to a resist layer on a substrate where N<+> layer, N channel layer, etc., are formed, a highly accurate projecting clicking die resist pattern part 13 constituting a thin pattern part 13 for controlling dimensions to be connected to a rectangular pattern part 14 is also drawn and formed. After that, when the pattern part 13 is observed aslant from the pattern part 14, the sectional area of the pattern part 13 can be observed. A three-dimensional resist pattern inspection including the sectional area can be made easily and highly accurately by visual inspection of pattern for controlling dimensions during this production process. |
