| 摘要 |
PURPOSE:To restrict irregular reflection of light from a high-reflection substrate and enable stable, improved optical length measurement to be made by applying polyimide soluble in an organic solvent. CONSTITUTION:When polyimide soluble to an organic solvent is spin-applied to the substrate 1 including a resist pattern 3 on a high-reflection substrate 1 such as Al film on a semiconductor substrate 2, to form a polyimide thin film 4, optical irregular reflection from the substrate 1 to 1/2, etc., is restricted. As a result, resist pattern can be optically measured by stably and properly, thus obtaining a highly reliable measurement result. |
