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发明名称
HEAT TREATMENT DEVICE
摘要
申请公布号
JPH02114515(A)
申请公布日期
1990.04.26
申请号
JP19880267954
申请日期
1988.10.24
申请人
TEL SAGAMI LTD
发明人
TANAKA DAISUKE
分类号
H01L21/22;H01L21/205;H01L21/31
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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