发明名称 CLAMPING DEVICE
摘要 <p>PURPOSE:To obtain a clamping device provided with a removal mechanism for self-generating dust by a method wherein a rectangular groove wider than the thickness of a plate is formed in the circumferential direction of the groove, the device is provided with a round pin having a rectangular groove, whose bottom is abutted on the end surface of the plate at the time of pinching, and moreover, a plurality of intake vents are opened in a region, where the groove forces the plate through a gap, of the round pin. CONSTITUTION:In a round pin 7, a circular part which is used as the bottom of a rectangular groove 71 is abutted on the end surface of a plate 5. There, the pin 7 is provided with intake vents 72, which are respectively opened on both sides of a region, where is abutted on the plate 5, of the pin 7. Exhaust vents 73 to interconnect to four pieces of the above intake vents 72 are provided in the center of the pin 7. For example, by turning the pressure in the interiors of the vents 73 from the atmospheric pressure into a negative pressure utilizing a vacuum pump and the like, dust generated in the vicinity of the region, where is abutted on the material 5, of the pin 7 is sucked in the vents 73 through four pieces of the vents 72 and is prevented from being adhered on the surface of the plate 5.</p>
申请公布号 JPH02114653(A) 申请公布日期 1990.04.26
申请号 JP19880269019 申请日期 1988.10.25
申请人 FUJITSU LTD 发明人 WATANABE YOSHIO;KURODA SHINICHI;KOYAKATA KO
分类号 B25J15/08;B65G47/90;B65H5/00;B65H5/14;G03F7/20;H01L21/027;H01L21/30;H01L21/677 主分类号 B25J15/08
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