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发明名称
POLY(HALOSTYRENE) FOR NEGATIVE RESISTS
摘要
申请公布号
DE3271595(D1)
申请公布日期
1986.07.10
申请号
DE19823271595
申请日期
1982.12.20
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
HATZAKIS, MICHAEL;LIUTKUS, JOHN JOSEPH;PARASZCZAK, JURIJ ROSTYSLAV;SHAW, JANE MARGARET
分类号
G03F7/26;C08F12/00;C08F12/16;G03F7/038;H01L21/027;(IPC1-7):C08F12/16;G03F7/10
主分类号
G03F7/26
代理机构
代理人
主权项
地址
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