发明名称 Continuous thin diamond film and method for making same.
摘要 A continuous thin diamond film having a thickness of less than about 2 microns has a low leakage. The thin diamond film may be supported on a supporting grid and may be incorporated into an X-ray window. The film may be formed in a DC assisted CVD process where in a first phase a relatively high concentration of a carbonaceous gas is introduced into the reactor and in a second phase the concentration of the carbonaceous gas is reduced to a lower value.
申请公布号 EP0365366(A1) 申请公布日期 1990.04.25
申请号 EP19890310880 申请日期 1989.10.23
申请人 CRYSTALLUME 发明人 PLANO, LINDA S.;RAVI, KRAMADHATI V.;PETER, MICHAEL G.;PINNEO, JOHN M.
分类号 C30B29/04;C23C16/27;C30B25/02;G03F1/22 主分类号 C30B29/04
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