发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To facilitate and insure adjustment work by mounting adjustment screws between a bonding stage and a supporting block and adjusting with adjustment screws a single transverse directing parallelism between a fixed face such as a lead presser pressured face and a mounting face of the bonding stage as well as a transverse axial parallelism with respect to the above single transverse direction respectively. CONSTITUTION:A bonding stage 10 and a supporting block 14 are combined by setscrews 16 and adjusting screws 17. Then, the bonding stage 10 goes up and down with the ascent and descent of the supporting block 14. If the adjusting screws 17 are rotated in tightening or loosening direction, the stage 10 fluctuates up and down according to the movements of the screws 17 and these adjusting screws are disposed at four places of the stage 10. Rotating operations of the required adjusting screws 17 in the tightening or loosening direction make it possible to adjust a single transverse direction parallelism between the mounting face 10a of the stage 10 and the presser contact face 13a of a lead presser 13 as well as a transverse axial parallelism with respect to the above single transverse direction parallelism.
申请公布号 JPH02112247(A) 申请公布日期 1990.04.24
申请号 JP19880263946 申请日期 1988.10.21
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 SASAKI KAZUHIKO;ONODERA ATSUSHI;ODAGIRI MASAO
分类号 H01L21/60 主分类号 H01L21/60
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