BARREL TYPE VAPOR PHASE GROWING DEVICE,申请号JP19880262374-传众专利搜索

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发明名称	BARREL TYPE VAPOR PHASE GROWING DEVICE
摘要
申请公布号	JPH02109323(A)	申请公布日期	1990.04.23
申请号	JP19880262374	申请日期	1988.10.18
申请人	NIPPON SANSO KK	发明人	MATSUMOTO ISAO
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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