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发明名称
DUAL-MODE CAVITY RESONATOR TYPE MICROWAVE PLASMA CVD DEVICE
摘要
申请公布号
JPH02107777(A)
申请公布日期
1990.04.19
申请号
JP19880260622
申请日期
1988.10.18
申请人
CANON INC
发明人
ECHIZEN YUTAKA
分类号
C23C16/50;C23C16/511;H01L21/205;H01L21/31
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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