| 摘要 |
<p>PURPOSE:To efficiently carry out air blow for a workpiece chuck from a very close position to the front of the workpiece chuck by providing a posture changeover means for changing over a nozzle pipe between an operating posture in which the end portion thereof is positioned in front of the workpiece chuck and a retracted posture separated from the workpiece chuck. CONSTITUTION:Prior to feeding a workpiece to a workpiece chuck 2, a nozzle pipe 40 in a first position is changed over to an operating posture by a posture changeover means 61. As a result, the end portion of the nozzle pipe 40 is brought close to the front of the workpiece chuck 2 to blow air out of the air blow-out port 40b on the end portion of the nozzle pipe 40. Thereby, the air blow can be carried from a position very close to the workpiece chuck 2 enabling efficient removal of foreign matter like chips, etc. deposited on the workpiece chuck 2. In this case, it is desirable to carry out the air blow while rotating the workpiece chuck 2.</p> |
