| 摘要 |
<p>PURPOSE:To make the film thickness of respective dyeing layers uniform and improve color reproducibility by depositing each film to be dyed separately to each group of dyeing layers after dividing a plurality of dyeing layers having each layer color filter into two groups or more, thereby performing dyeing after patterning the foregoing dyeing layers. CONSTITUTION:After forming photodetecting parts 2 on the surface of a semiconductor substrate 1 and further, forming a layer insulation film 3 as well as aluminum shading films 4 on the above photodetecting parts, intermediate layers 5-1 are formed. Films to be dyed are formed on the above intermediate layers and the films are immersed in a Magenta stainer to form a Magenta dyeing layer 6. An intermediate layer 5-2 is formed on the Magenta layer to form a cyanogen dyeing layer 7. Further, the first yellow layers 8 to be dyed are formed on an intermediate layer 5-3 and the second yellow layer 9 to be dyed is formed on a green picture element. These layers are formed into yellow dyeing layers 10 and finally the surface is leveled to form a transparent macromolecule resin film 11. In this way, since the dyed films having each upper layer color filter are formed by dividing the above films into two groups according to the presence of a lower dyeing layer 7, each uniform filter is formed and a color solid-state image sensing element which is superior in color reproducibility is obtained.</p> |
