| 摘要 |
PURPOSE:To improve the operating rate of a laser oscillating apparatus by controlling the temperature of a refrigerant feeding device so that the temperatures of optical parts may be higher than the temperature of a housing and lower than the specified maximum temperature, and preventing dew condensation on the optical parts. CONSTITUTION:In the cooling control system of a discharge excitation type gas laser oscillating apparatus, water is used as refrigerant. The flow path of the water is shown with a solid line, and a control path for an electric system is shown with a dotted line. Here, the cooling water passes through a holder 3 for an output mirror and a holder 4 for a rear mirror in this order. Therefore, the temperature of the output mirror is lower than that of the rear mirror. By controlling only the temperature T0 of the output mirror is controlled, dew condensation on other optical parts can be prevented. When the temperature T0 of the output mirror becomes lower than the temperature Ta within the cabinet, control is performed so that the temperature Ti of the cooling water outputted from an external chiller unit 7 is increased. Meanwhile, when the temperature T0 is increased higher than a maximum allowable temperature Tm 12 for the output mirror, the unit 7 is controlled so as to decrease the temperature Ti. |
