发明名称 Extreme ultraviolet reflector
摘要 A multi-faceted mirror forms a retroreflector for a resonator loop in a free electron laser (FEL) operating in the XUV ( lambda =10-100 nm). The number of facets is determined by the angle-of-incidence needed to obtain total external reflectance (TER) from the facet surface and the angle through which the FEL beam is to be turned. Angles-of-incidence greater than the angle for TER may be used to increase the area of the beam incident on the surface and reduce energy absorption density. Suitable surface films having TER in the 10-100 nm range may be formed from a variety of materials, including Al, single-crystal Si, Ag, and Rh. One of the facets is formed as an off-axis conic section to collimate the output beam with minimum astigmatism.
申请公布号 US4917447(A) 申请公布日期 1990.04.17
申请号 US19890306358 申请日期 1989.02.06
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE DEPARTMENT OF ENERGY 发明人 NEWNAM, BRIAN E.
分类号 G02B1/10;G02B5/09;G02B5/12 主分类号 G02B1/10
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