| 摘要 |
PURPOSE:To form an oxide superconducting film having the prescribed desired composition by reflecting a CO2 laser beam by a vibrating mirror, irradiating a vapor deposition source with the reflected CO2 laser beam, and allowing the grains evaporated from the vapor deposition source to adhere to the surface of a body to be subjected to vapor deposition. CONSTITUTION:A vapor deposition source 2 for yttria-stabilized zirconia, etc., and a base material 3 are disposed in a manner to be opposed to each other in a vacuum chamber 1 having a gas exhaust port 6. The above vapor deposition source 2 is irradiated with a CO2 laser beam from the outside of the vacuum chamber 1 via a laser- transmitting window 4, by which the grains evaporated from the evaporation source 2 are allowed to adhere to the surface of the base material 3 so as to be formed into a film. In the above CO2 laser vapor deposition method, the CO2 laser beam is reflected by a vibrating mirror 7 provided to the outside of the vacuum chamber 1 to undergo vibration, with which the evaporation source 2 is irradiated practically over the entire surface of the evaporation source 2. By this method, an oxide superconducting film, etc., consisting of plural components and having the prescribed desired composition can be formed on the base material 3 surface, and further, the service life of the vapor deposition source 2 can be prolonged. |
