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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02103936(A)
申请公布日期
1990.04.17
申请号
JP19880257713
申请日期
1988.10.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
HIGUCHI TETSUO;TOMINAGA ATSUSHI;NAKAJIMA TAKASHI;IKEGAMI MASAAKI
分类号
H01L21/318
主分类号
H01L21/318
代理机构
代理人
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地址
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