| 发明名称 | Antioxidant gas supply unit | ||
| 摘要 | Provided is an antioxidant gas supply unit including: a base body (10) in a shape of a hollow plate having antioxidant gas flow paths (53) and (54) defined therein; an antioxidation gas inlet (20) for letting an antioxidant gas flow into the antioxidant gas flow paths (53) and (54); a through hole (30) penetrating through the base body (10) in a through-thickness direction so that a capillary (72) is allowed to be inserted into and removed from the hole, and communicating with the antioxidant gas flow paths (53) and (54) to let the antioxidant gas flow out; and a film heater (40) attached to an outer surface of the base body (10) around the through hole (30). The antioxidant gas supply unit has a compact structure and is capable of effectively heating a free air ball. | ||
| 申请公布号 | US9044821(B2) | 申请公布日期 | 2015.06.02 |
| 申请号 | US201414321134 | 申请日期 | 2014.07.01 |
| 申请人 | SHINKAWA LTD. | 发明人 | Maeda Toru;Sakakura Mitsuaki |
| 分类号 | B23K37/00;B23K20/00;B23K9/16;H01L23/00 | 主分类号 | B23K37/00 |
| 代理机构 | Katten Muchin Rosenman LLP | 代理人 | Katten Muchin Rosenman LLP |
| 主权项 | 1. An antioxidant gas supply unit comprising: a base body in a shape of a hollow plate having an antioxidant gas flow path defined therein; a through hole penetrating through the base body in a through-thickness direction, so that a capillary is allowed to be inserted into and removed from the hole, and communicating with the antioxidant gas flow path to let an antioxidant gas flow out; and a film heater attached to an outer surface of the base body around the through hole. | ||
| 地址 | Tokyo JP | ||