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发明名称
SELEKTIVES DOTIERUNGSVERFAHREN VON ISOLATIONSGRUBEN FUER CMOS-ANORDNUNGEN.
摘要
申请公布号
AT51466(T)
申请公布日期
1990.04.15
申请号
AT19860904666T
申请日期
1986.07.09
申请人
AMERICAN TELEPHONE AND TELEGRAPH COMPANY
发明人
LEBOWITZ, JOSEPH;SEIDEL, THOMAS, EDWARD
分类号
H01L21/00;H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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