| 摘要 |
A method of inspecting V-shaped grooves, e.g. grooves for optical fibres, is carried out in the following steps. Coordinates of more than 20 points per groove (1) on a substate formed with V-shaped grooves ar emeasured with a stylus (3) moving in directions perpendicular to the longitudinal directions of the grooves. Data measured within regions of at least 10 mu m at the edges (5) and bottom (6) of the grooves are removed from the data so obtained. Shapes formed by straight lines are then calculated on the basis of remaining data on effective measuring lengths of more than 40 mu m. A method of working the V-shaped grooves is effected by the following steps. A circle (7) having a diameter substantially equal to that of fibres to be supported in the grooves is drawn inscribed in the interior of a V-shaped groove of shape calculated by the above method. The groove is then worked, while errors in the centre position of the circle are fed-back into the working process of the groove of the substrate to compensate for variation of depths and pitches of the V-shaped grooves being worked.
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