| 摘要 |
<p>PURPOSE:To enable high-speed X-ray transfer by a method wherein a mask for X-ray exposure use is provided, an internal space surrounded with the supporting frame and membrane of the mask is sealed at the time of relative transfer of the mask to a wafer and the vibration of the membrane is inhibited. CONSTITUTION:An internal space 12 surrounded with a supporting frame 2c and a membrane 2a of a mask 2 for X-ray exposure use is sealed with a vibration preventive plate 14 at the time of relative transfer of the mask to a wafer, such as separation or approach. Whereupon, gas in the space 12 acts as a damper. Therefore, even if the membrane 2a is made to vibrate by the pressure of gas interposing between the wafer and the membrane 2a, the vibration can be rapidly inhibited. Accordingly, an X-ray transfer can be executed at high speed. Moreover, when the plate 14 is moved from the upper part of a mask holder 10 to a position, where does not interrupt the transfer the sealing of the space 12 is released.</p> |
