| 发明名称 |
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| 摘要 |
PURPOSE:To obtain a surface acoustic element which has satisfactory reproducibility of piezoelectric performance, etc. and excellent transmission characteristics, by using an elastic matter structure in which an aluminum nitride film having orientation of a piezoelectric axis on a sapphire substrate coated with a silicon film. CONSTITUTION:A silicon film 6 is formed on the surface of a sapphire substrate 5 to obtain a substrate 1. An aluminum nitride film 2 made of a single crystal epitaxial film is formed on the surface of the substrate 1 so that the piezoelectric axis of the film 2 is set vertical or horizontal to the surface of the substrate 1. Then a surface acoustic wave generating electrode 3 and a surface acoustic wave detecting electrode 3 are formed with comb-shaped electrodes on the surface of the film 2. Thus the surface acoustic wave is transmitted in the diection vertical or horizontal to the direction of the piezoelectric axis of the film 2. |
| 申请公布号 |
JPH0213853(B2) |
申请公布日期 |
1990.04.05 |
| 申请号 |
JP19820039240 |
申请日期 |
1982.03.11 |
| 申请人 |
MIKOSHIBA NOBUO;TSUBOCHI KAZUO |
发明人 |
MIKOSHIBA NOBUO;TSUBOCHI KAZUO;SUKAI KAZUYOSHI |
| 分类号 |
H03H9/145;H03H3/08;H03H9/02;H03H9/25 |
主分类号 |
H03H9/145 |
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