| 摘要 |
PURPOSE:To improve the heat resistance, heat shock resistance, and strength by laminating a heating section mixed with SiC and specific ZrB2 and an insulating section made of specific AIN and molding and sintering them. CONSTITUTION:A conducting section 1 mixed with sic and ZrB2 with the powder content of 5% or below having the grain size of 5mum or below and an insulating section 2 made of AlN with the power content of 5% or below having the grain size of 5mum or below are laminated and molded and sintered. A heating element with improved heat resistance, heat shock resistance and strength is obtained. BN may be added to AlN so that the thermal expansion coefficient of the insulating section is matched with that of the heating section. |
