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发明名称
MANUFACTURE OF SEMICONDUCTOR SENSOR AND SEMICONDUCTOR STRAIN GAUGE
摘要
申请公布号
JPH0294666(A)
申请公布日期
1990.04.05
申请号
JP19880248068
申请日期
1988.09.30
申请人
NEC CORP
发明人
YAMADA KEIZO
分类号
G01P15/12;G01L9/00;G01L9/04;H01L29/84
主分类号
G01P15/12
代理机构
代理人
主权项
地址
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