发明名称 Semiconductor device having a built-in capacitor and manufacturing method thereof.
摘要 <p>A semiconductor device having a built-in capacitor (22) comprises a substrate (21), an internal electrode (22a) provided on a top side of the substrate, a dielectric film (22b) provided so as to cover the internal electrode for establishing a predetermined capacitance, a surface electrode (22c) provided on the dielectric film so as to make a contact therewith, a plurality of through holes (31 - 34) formed in the substrate in correspondence to the internal electrode so as to extend from a bottom side to the top side, and a back-side electrode (24) provided on the bottom side of the substrate including the through holes so as to make a contact with the internal electrode through the through holes.</p>
申请公布号 EP0361900(A2) 申请公布日期 1990.04.04
申请号 EP19890309843 申请日期 1989.09.27
申请人 FUJITSU LIMITED 发明人 KAWAI, TAKAHISA
分类号 H01L27/04;H01L21/02;H01L21/70;H01L21/822;H01L21/8252 主分类号 H01L27/04
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