| 摘要 |
PURPOSE:To simplify constitution and to perform accurate detection by making the pattern of a light detection means variable in an electrically arbitrary manner. CONSTITUTION:A light detection means 6 is constituted of units 6a partitioned in a grid like state and the spot of the light from an object 1 is caught by an optical means 5 such as the lens 5a of a camera to be guided to the means 6. The units 6a are formed into an IC by integrally arranging photodetectors so that the spot of the light indicated by a pattern setting means is detected and the unit to be detected is arbitrarily indicated to be set. A way to indicate is constituted so that the longitudinal, lateral, radial and rotary directions of the pattern of the means 6 are successively changed over to detect the spot of the light from the object 1. When measurement is performed in the stationary state of the object 1, the pattern setting means changes the pattern at every indicated pattern in a time series manner to detect the spot of the light from the object 1. Since the pattern setting means making the pattern of the means 6 variable is integrally formed into an IC along with the means 6, accurate detection can be performed simply without scaling up the apparatus. |
