Notch-cut semiconductor wafer, and method and apparatus for chamfering the notch.

摘要

A notch-cut semiconductor wafer whose notch has its both corners entirely chamfered, and an apparatus and method for chamfering the notch as such, which employs a positioning means for positioning the wafer such that the notch of the wafer points in a predetermined direction; a conveyor means for conveying the wafer to a chamfering position; a holding means for holding the wafer to bring the wafer to arbitrary places; an abrasive wheel having an edge which is shaped like the notch; a driving means for driving the abrasive wheel; and a means for controllingly moving at least one of the two items consisting of the abrasive wheel and the semiconductor wafer, to arbitrary places.