| 摘要 |
PURPOSE:To make it possible to highly accurately position without large force by mounting the first and second members having a screw part and a tapered part engaged with each other on the relatively movable first and second structures, respectively. CONSTITUTION:A box shaped slider 49 as the first structure is movably supported on slider guide rails 46, 47, and on this slider 49 a box shaped spindle support 51 as the second structure is inclinably supported via an angle measuring means 50. On the underside of the slider 49, a positioning device 210 for positioning the spindle support 51 to a prescribed angle is provided. Positioning is performed keeping a state where an engaging shaft being the first member is coupled with an engaging bush 214 being the second member, so that the accuracies of the slider 49 and the spindle support 51 for zero return range within 1mum, enabling the high precission rapid operation. |
