| 摘要 |
PURPOSE:To allow well and efficient processing by executing the formation of holes or grooves on a base material in an oxygen atmosphere of a specific concn. and atmosphere of specific relative humidity at the time of forming the holes or grooves by condensing and scanning an energy beam to the base material. CONSTITUTION:The atmosphere of 21 to 100vol.% oxygen concn. or the atmosphere of 50 to 100% relative humidity RH or both the atmospheres are formed. The base material 18 consisting of AlN ceramics is imposed on a stage 11 and is covered by an atmosphere box 13. Gaseous oxygen having 99.99% purity is supplied into the box through a supply pipe 14 and a discharge pipe is held open to discharge the gas in the box 13. The laser beam 19 is released and is reflected by a galvanometer type mirror and is condensed by a lens so as to be passed through a glass plate 12, by which the base material 18 is irradiated with the laser beam and is subjected to drilling. The worked hole is excellent in both the perpendicularity and out of roundness. There is no deposition of metal Al around the hole on the front surface side of the base material on the laser beam incident side and the rear surface thereof. The good and efficient working of the holes or grooves is executed in this way without depositing the metal Al in the gaseous phase and without allowing the metal Al to remain therein. |
