CONCENTRATOR FOR FLUOROCARBON-CONTAINING GAS

摘要

PURPOSE:To make the rate of concentration of a fluorocarbon-containing gas higher by dehumidifying a gas containing fluorocarbon in low concentration thought an adsorption material consisting chiefly of zeolite and concentrating such gas after dehumidification by the action of gas adsorption and desorption produce through the honeycomb structure of an active carbon. CONSTITUTION:A dehumidifier 12 is provided with a rotor 20 consisting of a honeycomb structure containing zeolite as a main component and means for providing a dehumidifying zone 21 and regeneration zone 22 to the rotor 20. A gas containing fluorocarbon in low concentration is sent to the dehumidifying zone 21 and a heated regeneration air is sent to the regeneration zone 22. The gas containing fluorocarbon in low concentration, after dehumidification in this way, is sent to a concentrator 13 for concentration by the action of the gas adsorption and desorption produced through the honeycomb structure of an active carbon. This small-size device permits a highly concentrated fluorocarbon gas to be obtained with a high rate of concentration.