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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0290650(A)
申请公布日期
1990.03.30
申请号
JP19880242815
申请日期
1988.09.28
申请人
SEIKO EPSON CORP
发明人
SUZUKI TAKAFUMI
分类号
H01L21/822;H01L21/66;H01L21/82;H01L27/04;H01L27/118
主分类号
H01L21/822
代理机构
代理人
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地址
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