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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH0290610(A)
申请公布日期
1990.03.30
申请号
JP19880245040
申请日期
1988.09.28
申请人
NEC CORP
发明人
YAMADA YOSHIAKI
分类号
H01L21/3205;H01L21/28
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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FUEL ASSEMBLY OF BWR TYPE REACTOR
