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发明名称
摘要
申请公布号
JPH0247035(U)
申请公布日期
1990.03.30
申请号
JP19880126127U
申请日期
1988.09.27
申请人
发明人
分类号
H01L21/60;H01L21/66
主分类号
H01L21/60
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代理人
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地址
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