| 摘要 |
PURPOSE:To enable electrons to converge near a center axis to be a converged electron beam and to generate a convergent high speed atomic beam by a method wherein electrons emitted from a first cathode through discharge are made to penetrate through magnets rotated by 90 degrees off each other. CONSTITUTION:Magnets 27 and 28 are arranged at positions so as to be rotated by 90 degrees off each other, and a magnetic field between an N pole and an S pole of each magnet intersects at a right angle with an electric field between a needle- shaped anode 21 and a second cathode 22. The electric field between the anode 21 and the first cathode 22 is so applied as to be perpendicular to this paper. When electrons emitted from the first cathode 22 by discharge penetrate through the magnet 28 from the rear side of this paper toward the front side, the electrons grows to be a beam flat in a direction of an A-B line and are incident on the magnet 27. As the magnet 27 is rotated by 90 degrees off the magnet 28, the flat electron beam is made to converge near a center axis penetrating the magnet 27. Oxygen ions occurred by the collision of the converged electron beam with residual oxygen gas are injected into an ion neutralization nozzle 23 as a well-converged beam, because they are generated from a narrow crosssection, and the well-converged beam is converted into an oxygen high speed atomic beam. |
