| 摘要 |
PURPOSE:To improve the measuring accuracy of a laser displacement meter by reducing the noise component of reflected beam of light of the displacement meter, in which measures the distance to an object based on the reflected beam of light from the object irradiated with a laser beam, produced by the very small variation in surface shape of the object by a fuzzy inference. CONSTITUTION:An arithmetic means 14 which calculates a prescribed arithmetic expression for finding the inferred displaced quantity of an object Oj to be measured, which is obtained by removing a noise component from the signal waveform representing the displaced quantity and containing the noise component, is provided. In addition, an output correcting device 20 operating as a fuzzy inferring means which extracts an input parameter for a fuzzy inference from the signal waveform containing the noise component and finds the coefficient used for the arithmetic expression based on the parameter and each membership function of the coefficient is provided. Then the displacement of the object Oj from which the noise is removed is inferred from output waveforms of a laser displacement meter 10, drive circuit 13, and process circuit 14 by the fuzzy inference and the outputs are corrected. Therefore, the displacement of the object Oj can be measured with high accuracy. |
