| 摘要 |
<p>PURPOSE: To continuously supply a measurement device with gas at a very low flow velocity by attaching a small diameter pipe containing a specified short part being pressed/collapsed so that the inside wall comes contact with each other, to a connection means of the measurement device. CONSTITUTION: A small diameter pipe 1 containing, constructed of a metal of ductility (for example, copper), a specified short part pressed/collapsed for contact to its inside wall 7 is provided, and the pipe is attached to a connection means 9 which, by seating around the pipe, attached the pipe to the measurement device for sound absorption and desorption of gas. As a result, regardless of a back pressure changing from a vacuum state to at least 1/10 of upstream supply pressure, the pipe is allowed to continuously supply the measurement device with gas at a very low flow rate. Thus, for measuring desorption and absorption of gas, a very low flow rate is provided, so that accurate measurement becomes possible in a very wide pressure range, for higher reliability and the safe and low cost regulator can be obtained.</p> |
