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发明名称
PROCESS TO OPERATE A SECONDARY ION MASS SPECTROMETER
摘要
申请公布号
EP0350815(A3)
申请公布日期
1990.03.28
申请号
EP19890112494
申请日期
1989.07.07
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
VON CRIEGERN, ROLF, DIPL.-PHYS.
分类号
H01J37/256;H01J49/04;(IPC1-7):H01J37/256;G01N23/225
主分类号
H01J37/256
代理机构
代理人
主权项
地址
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